Q&A ‘Plasma system to clean optical mirrors’

donderdag, 30 april, 2015

In vervolg op de plaatsing op de ITER-NL website van de ITER-NL tender betreffende een ‘Plasma system to clean optical mirrors’ zijn een aantal vragen binnengekomen, die we aan de vragenstellers hebben beantwoord. Parallel aan het antwoorden maken we de vragen en antwoorden ook openbaar via dit bericht en via de ITER-NL website.

 

Questions and Answers:

Q1 - Which kind of Gases you will use for your plasma cleaning technology?

A1 – Please consider the use of Ar, He and H2.

 

Q2 – How should be realized the interface r.f. electrode/ sample holder

A2 – For matching/power adjusting conditions, a simple disk shape electrode can be made that will be placed at a certain distance from the RF powered  electrode.

 

Q3 - Should the sample holder be content of the offer?

A3 – No, the sample holder does not need to be included in the offer.

 

Q4 – Where has the vacuum chamber a flange or a vacuum door to assemble the electrode and changing the samples?

A4 – The vacuum chamber is a cylinder of approx.. 800 mm diameter and 1.000 mm length and it has a large, 800 mm side door. Through that door we can access the interior of the chamber.

 

Q5 – Do you want to change the generator frequency from process to process or during one cleaning process?

A5 – Yes, we might need to change the generator frequency from process to process. This is From 60 MHz down to 13 MHz, and above 60 MHz up to 80-100 MHz.

 

Q6 – Do you allow the use of copper for the metal gasket for the CF-flanges?

A6 – The use of copper metal gaskets for the CF flanges is allowed.

 

Q7 – Shall the offer be in English?

A7 – No, the offer may be in the Dutch or the English language.

 

Q8 – The integration shall be done at the clients premises. Is the client TNO or one of the US consortium members?

A8 – TNO, location Stieltjesweg, Delft will be the client.

 

Q9 – Do we have to take into account the delivery of spare parts? Due to the plasma, parts can wear might need to be replaced. If so, please specify the parts and the amount.

A9 – Which parts are mentioned here? If the dielectric components, such as high-voltage insulators, have risk of being eroded after some time due to plasma, the we will need a spare set of these parts. We assume such parts however to be plasma resistant and not to be sputtered, such as e.g. Al2O3 ceramic, as specified in Appendix 1.

 

Q10 – Will the project be accepted and paid when the set-up meets the requirements as specified in Appendix 3?

A10 – Part of the project plan will be a cost estimate and payment plan. Payment will be done according to progress in retrospect to the maximum amount specified in the project plan.

 

Q11 – Is the mounting flange fixed in size? If a larger size flange can be used, all electrode components can be mounted outside the chamber and easily integrated in the vacuum system.

A11 – The chamber has a large door (800 mm diameter) in the side wall. There is an access through the door to the inner chamber volume. Then the assembled components can be installed from the inside of the chamber. 100CF flange is determined by the size of the existing multi purpose chamber flange where we have to mount (and later dismount if needed) the whole system.

 

Q12 – No copper is allowed facing vacuum and plasma. The CF gasket are normally OFHC copper. A small surface of the gasket will face the vacuum side. What is preferred: gold plated or nickel gaskets?

A12 – You can use normal copper gaskets facing vacuum. The requirement was more related to the electrode components and adjacent grounded wall components facing plasma.

 

Q13 – The RF power supply and matcher specifications differ from the standard available components. We will offer an adapted power supply and matcher. Shall we offer a standard available power supply. There will be a significant price difference.

A13 – We are interested in multi-frequency 20-80 MHz power supply in the range. Also the pulsed power mode of operation is essential. In the offer, the use of several individual power supplies such as 13 MHz, 40 MHz, 60 MHz and 80 MHz may be envisaged to reduce total cost.

 

Q14 – An own investment of 25% will be applicable, why and can this amount be reimbursed otherwise?

A14 – This requirement is a condition for funding projects by the ITER-NL program. It is envisaged that the work carried out will bring relevant experience and network to be in a better position to bid for ITER or other High-tech projects.